CQ Crystalline Silica Wafers
Asahi Glass now offers a high energy throughput crystalline silica material for DUV and EUV applications. The AGC crystalline silica material is designed as a lower cost, chemical resistant, dimensionally stable alternative to CaF for high energy optics.
Product Information
CQ Crystalline Silica Wafers
AGC DUV Transmission Data
AGC's CQ crystalline silica has high energy transmittance to below 150nm, with superior laser durability.
AGC ArF Irradiation Data
AGC's improved crystal performance has been greatly improved versus conventional crystalline quartz under the severe irradiation condition of one billion pulses at 5mJ/cm2, see graph below. The induced absorption at 193nm of the AGC improved CQ crystalline silica has been reduced by 600%.
Available Dimensions
AGC's CQ crystalline silica is a true alternative to CaF for the most demanding high energy applications. Additionally, AGC manufactures other optical and electronic grade substrates for a variety of applications including our Low OH AQ grade fused silica material; SW MEMS substrates and AS optical glass substrates.
AGC Birefringence Data
The birefringence value of the AGC CQ crystalline silica is well below the typical 10nm/cm, peak-to-valley.
AGC Homogeneity Data
AGC CQ crystalline silica has been able to achieve excellent homogeneity of less than 10-ppm through proprietary manufacturing processes.